Manometer Noise Filter
Fan Fault Detector Retrofit P34 Match Fan Interlock
TVIC-1
WLS-Water Level Sensor
TEL CT request
PSMS-PSC Monitor Selector
MPS1515-(Mattson 15V power)
LFD-Lamp Failure Detector
Flow Meter Interlock
Slit Door Sensor - 4
Door Interlock
Magnet Current Detector
New type Terminal Blocks
P5K_Magnet Current Detector
Current Sense Amplifier & Signal Filter
MFC Helium Noise Filter for MxP / Super-E
FFD-135C (Fan Fault Dector)
DPA (Dry Pump Alarm)
DPI-2D（Dry Pump Interlock Interface）
DPI-3B（Dry Pump Interlock Interface）
DPI-4（Dry Pump Interlock Interface）
DPI-LAM9400（Dry Pump Interlock Interface）
Cot Exhaust Pressure Interlock Delay Keep Timer
LCD 电流测试机
GBS 玻璃破片检测系统
DIN FUSE module
DIN FUSE module
Chamber Control Module
RF matching box control cable
WSI-Wafer Sensor AND interface
LCM Test Board
Wafer Rangefinder
Phasetronics Lamp Driver
Mattson ASPEN -Ⅲ Power Supply
Chamber Control Module
Heater Susceptor Leveling System 300mm
Heater Susceptor Leveling System 200mm
Magnet Driver Repair(P/N:0190-02703)
Gamma Robot Controller Repair
RF Cable
Magnet Driver Repair(P/N:0190-70060)
NeMagnet Driver Repair (P/N:0190-17272)
eMagnet Driver Repair (P/N:0010-14796)
Mattson ASPEN -Ⅲ AC power Box 300mm
TPS PWB 12-406247-03
Rotation Motor Homonic Driver
IP Stepper Motion Board
cPCI Power Card
Mattson Terminal Pan (LED board) Repair
Kuka Robot Cable (前段)
Kuka Robot Cable
讯号线
SPEC, LPT 2200 SMIF INTERLOCK ADAPTER
CABLE RFLCTD PWR 20/22AWG 2COND
CABLE ASSY TC GAUGE CENTURA
滤波器(25pin 连接器)
MKS 649A Noise Filter Cable
MFC直角转接头，可内含MFC Noise滤波器
APC 2L86-01314-1 加热器线组
AMAT APPLIED 0090-20003 SENSOR ASSY,VALVE SENSOR AND HARNESS NEW
CABLE ASSY,FAC-PANEL TO E-DTCU
CABLE ASSY ESC HV INTERFACE DPS
HARNESS ASSY, THROTTLING GATE VALVE DPS+
CABLE, HARNESS ASSY, SERVICE/PROCESS MANOMETERS
Circle metal connector 19pin 3 meter cable
Manometer Noise Filter
Mattson RF on/off Test Tool
HARN ASSY LIFT UP/DOWN SENSOR
D-sub 50 pin connector 3 Meter Cable
风扇电源线
P/N:0140-37759 改良版
Connect to EV valve 24V
RF Cable
P5000 GATE Valve Cable
Check encoder Cable
DPS H-V Module Diagnostic Cable
DPS matching box P4 cable
MFC Cable
H-V Module Cable + Noise Filter(HVC-3M)
Robot Extended Cable
Photo Sensor Cable(PSC)
25 pin D-sub Cable
9 pin D-sub Cable
MFC Monitor Cable
RF matching box cable (RFC-1)
RF matching box cable (RFC-2)
RF matching box cable (RFC-3)
Super-E RF Matching Box Cable
Manometer Sheilding Cable隔离RF电磁波干扰
SEZ Tool Cable
P5000 Matching Box Cable
ECO Cable
PSLD cable
H-V Module Cable + Noise Filter(HVC-3S)
AMAT P233 Lifter Motor Cable
